mems (micro electro mechanical system) is developed on the basis of semiconductor manufacturing technology. it is the integration of microcircuits and micromechanics on the chip according to the functional requirements. based on the semiconductor technology such as lithography and corrosion, it integrates ultra precision machining, and combines materials, mechanics, chemistry and optics to make a millimeter or micron level mems the system has accurate and complete electrical, mechanical, chemical, optical and other characteristics.
mems devices mainly include sensors, actuators, micro energy, etc. the sensors are relatively mature, and most of the actuators and micro energy are in the initial stage
sensor: mems sensor is a mature mems device, including pressure sensor (which can also measure air pressure and height through pressure sensor), inertial sensor (accelerometer, gyroscope, geomagnetic sensor, or combination of two in one or three in one), mems mack wind, environmental sensor (temperature and humidity), thermal radiation, etc. among them, inertial sensor and mems microphone have almost become the standard configuration of new equipment. the application of temperature, humidity and pressure sensors in mobile terminals, especially in some wearable devices, is expected to spread rapidly.
actuators: mems actuators also have some mature applications, such as flow control (inkjet), baw (bulk acoustic wave) filters in rf devices, baw diplexers, etc., but a large number of future application scenarios will not be limited to this, such as mems oscillator / resonator, mems speaker, mems camera, mems mirror (for micro projection field), etc.
micro energy: mems fuel cell has high energy density. replacing the current cell phone battery with mems fuel cell can extend the theoretical battery life to several weeks, but the current cost is as high as $300.
application stage of each mems device (red = sensor, blue = actuator, purple = micro energy)
mems has the advantages of small size, light weight, low power consumption, good durability, low price and stable performance. the unique characteristics of mems system make it have application potential in many fields. although there are many applications, the overall mems market is still in its infancy, and a large number of mems systems still have broad market potential. globally, the current market size of mems is about 12 billion us dollars, which is expected to reach nearly 20 billion us dollars in 2020, with an annual compound growth rate of 11.6%, far exceeding the single digit growth rate of traditional semiconductor industry. among them, the integrated inertial sensor and micro display will grow rapidly. more than 70% of mems and mems products are used in the whole market. with the maturity of mems actuator production technology and the increase of application scenarios, it will also achieve rapid growth in the future.
due to the gradual transfer of hardware innovation market to china in recent years, the growth rate of mems sensor demand in china is much higher than that of global mems market, about 13.9%. by 2020, the total market size will be nearly 6 billion us dollars.
mems is currently mainly used in consumer electronics, automotive and other fields. with the continuous maturity of products, aerospace, medical and industrial applications are gradually popularized.
in 2010, driven by mems microphones, inertial sensors, etc., the mems market began to enter a period of rapid growth. from the perspective of downstream applications, automobile and consumer electronics are the most important application fields. however, from 2010 to 2015, the compound annual growth rate of automobile was 6.8%, higher than the 5.1% cagr of consumer electronics. mems is the electronic component with the greatest growth potential in the next few years. the functions of indoor navigation, background recognition, keyword recognition, full-time power on, full-time listening, and more accurate action recognition have put forward new requirements for mems. due to the rapid basic innovation in the field of consumer electronics, mems has also become an important basic component of innovation. in the downstream application field, the rapid growth is still in the field of consumer electronics, with the cagr of 10.9% from 2015 to 2020. from 2015 to 2020, the cagr of automobile, industry and medical treatment were 4.3%, 7.7% and 11.8% respectively.
in terms of downstream applications, automotive and consumer electronics are also the main growth drivers in china's mems industry, with cagr of 12.4% and 10.6% respectively from 2010 to 2015. in the future, due to the rapid localization process of china's consumer electronics and automobile industry chain, it will still maintain high-speed growth. the compound annual growth rate of consumer electronics is expected to reach 17.2%, and the growth rate of automobile will be 10.3%.